Electron-enhanced atomic layer deposition of silicon thin films at room temperature
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چکیده
منابع مشابه
Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 2018
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.5006696